Transform Electronics, Photonics, and Biomedical Research by Nanofabrication
基于纳米制造的转化电子学、光子学和生物医药研究
Xiuling Li（李秀玲）
ABSRACT
My group's general interests are in the area of semiconductor materials and devices, as well as electromagnetics. We focus on developing innovative structures and device concepts through bottom-up growth1 and top-down fabrication2 approaches to bring lasting impact to the field of electronics, photonics, and quantum3 technologies; and possibly medicine. In this talk, I will present two of the nanofabrication platforms we innovated recently and aim to address some of the pressing issues in nanofabrication and applications: (1) an unorthodox anisotropic etching method, metal-assisted chemical etching (MacEtch), that enables site-controlled semiconductor nanostructure top-down fabrication with unprecedentedly high aspect ratio and materials and structure versatility;3,4 and (2) a 3D self-rolled-up membrane (S-RuM) nanotechnology platform for extreme miniaturization of passive electronic components, including inductors, transformers, and filters, for radio frequency integrated circuits (RFICs) and power electronics, as well as biological applications.5-7
我们团队的主要研究领域是半导体材料和器件以及电磁学方向。我们专注于通过自下而上的生长和自上而下的加工来开发新型的结构和器件，从而给电子、光子学和量子技术，乃至于医学领域带来持久的影响。在本次演讲中，我将介绍我们新近创新的两种纳米制造平台，它们旨在解决纳米制造和应用中的一些紧迫性问题。（1）一种非传统的各向异性蚀刻方法：金属辅助化学蚀刻（MacEtch），能够以前所未有的高纵横比，以及材料和结构的多功能性来实现自控的半导体纳米结构的自上而下制造；（2）一个三维自卷膜（S-RuM）纳米技术平台，用于实现包括电感、变压器和滤波器在内的无源电子元件的超微型化，其在射频集成电路（RFIC）、功率电子以及生物应用中具有广阔前景。
BIOGRAPHY
Xiuling Li received her B.S. degree form Peking University and Ph.D. degree from the University of California at Los Angeles. Following post-doctoral positions at California Institute of Technology and University of Illinois, as well as industry experience at II-VI, Inc. (formerly EpiWorks, Inc.), she joined the faculty of the University of Illinois, Urbana-Champaign (UIUC) in 2007. She is currently the Donald Biggar Willett Professor in Engineering in the Department of Electrical and Computer Engineering (ECE) and the interim director of the Nick Holonyak Jr. Micro and Nanotechnology Laboratory at UIUC. She has published >150 journal papers and holds >20+ patents, delivered > 120 invited lectures worldwide. Her research has been honored with the NSF CAREER award, DARPA Young Faculty Award, and ONR Young Investigator Award. She was elevated to be a Fellow of the IEEE, the American Physics Society (APS), and the Optical Society (OSA) in 2017, 2018, and 2019, respectively. She currently serves as a Deputy Editor of Applied Physics Letters and Vice President for Finance and Administration of the IEEE Photonics Society.
李秀玲教授分别在北京大学、加州大学洛杉矶分校获得学士学位和博士学位，随后在加州理工学院和伊利诺伊大学进行博士后研究，并且在II-VI公司（前身为EpiWorks公司）拥有相关的行业经验。她于2007年加入伊利诺伊大学厄巴纳-尚佩恩（香槟）分校（UIUC），目前是电气和计算机工程系（ECE）的Donald Biggar Willett教授，及Nick Holonyak Jr.微纳技术实验室的轮值主任。目前已发表150多篇期刊论文，拥有20多项专利，并受邀在全球范围内进行了120多次演讲。基于上述丰硕的研究成果，李秀玲教授获得了NSF职业奖、DARPA青年教师奖和ONR青年研究人员奖。她在2017年、2018年和2019年分别被评为美国电气电子工程师学会(IEEE)、美国物理学会（APS）和光学学会（OSA）的会士。目前担任应用物理快报（Applied Physics Letters）的责任编辑和IEEE光子学会副主席。