Silicon Carbide Micro-/Nanosystems for Harsh Environment Applications
应用于恶劣环境的碳化硅微/纳米系统
Maboudia Roya
ABSRACT
Silicon has been the dominant semiconducting material in micro-/nanosystems technologies. However, the material and surface properties of silicon impose limitations on its use in applications involving harsh environment (such as high temperature, high radiation and corrosive conditions). Silicon carbide (SiC), a wide bandgap semiconductor, is emerging as a material to address the limitations of silicon as it is temperature tolerant, radiation resistant, and chemically inert. In this talk, I will present recent advances, by our group and others, in the materials science and manufacturing technology of SiC thin film and low dimensional structures, and some applications that these advances have enabled ranging from harsh environment sensing to energy technologies.
硅一直是微/纳米系统技术中占主导地位的半导体材料。然而，硅的材料和表面特性限制了其在恶劣环境(如高温、高辐射和腐蚀性条件)中的应用。碳化硅(SiC)是一种宽带隙半导体，它是一种新兴的材料，用来解决硅在耐温、耐辐射和化学惰性等方面的局限性。在这次演讲中，我将介绍我们小组和其他课题组在材料科学及碳化硅薄膜和低维结构制造技术方面的最新进展，以及其在恶劣环境的传感和能源技术的应用。
BIOGRAPHY
Roya Maboudian is Professor of Chemical and Biomolecular Engineering and Co-Director of the Berkeley Sensor & Actuator Center (BSAC) at the University of California, Berkeley. She received her B.S. degree in Electrical Engineering from the Catholic University of America, Washington, D.C., and her M.S. and Ph.D. degrees in Applied Physics from the California Institute of Technology in Pasadena. Her research interest is in the surface/interface and materials science and engineering of micro/nanosystems, with applications in harsh-environment sensing, health and environmental monitoring, and energy technologies. Her research has addressed several technological barriers and has enabled a number of new and promising applications in sensor technology. She is the recipient of several awards, including the Presidential Early Career Award for Scientists and Engineers (PECASE) from the White House, NSF Young Investigator award, and the Beckman Young Investigator award. She is a Fellow of the American Vacuum Society and a Bakar Fellow. She has served as editor to IEEE Journal of Microelectromechanical Systems (JMEMS) and as associate editor to IEEE/SPIE Journal on Micro/Nanolithography, MEMS and MOEMS (JM3), and is currently serving as associate editor to ACS Sensors. She has also served on the technical program committees of several IEEE Solid-State Sensors and Actuators Conferences.
Roya Maboudian是加州大学伯克利分校的化学和生物分子工程系教授，也是伯克利传感器和执行器中心(BSAC)的共同主任。她在美国天主教大学华盛顿特区分校获得电气工程学士学位，在帕萨迪纳的加州理工学院获得应用物理学硕士和博士学位。她的研究方向是微/纳米系统的表/界面问题和材料科学与工程研究，及其在恶劣环境传感、健康和环境监测以及能源技术方面的应用。她的研究解决了一些技术障碍，并使传感器技术的一些新的、有前途的应用成为可能。她获得过许多奖项，包括白宫的“总统早期科学家和工程师职业奖”(PECASE)、美国国家科学基金会青年研究员奖和贝克曼青年研究员奖。她是美国真空协会的会士，也是Bakar会士。她担任IEEE微机电系统期刊(JMEMS)的编辑，IEEE/SPIE微/纳米光刻期刊、MEMS和MOEMS (JM3)的副编辑，目前担任ACS传感器的副编辑。她还在几个IEEE固态传感器和执行器会议的技术计划委员会任职。