Enabling Design and Manufacturing for Flexible Hybrid Electronics
柔性混合电子使能设计与制造技术
Yongan Huang（黄永安）
ABSRACT
Flexible hybrid electronics is a kind of integrated solution which aims to remain the processing function and performance of traditional integrated circuits while realizing the advantages of flexible electronics. Its fabrication process should be compatible with microelectronics technology and printing process. This report mainly introduces the design method and manufacturing principle of flexible hybrid electronics.
1）Delicate structure design of flexible hybrid electronics: Self-similar fractal structure, conformal analysis for non-stretchable materials on curved surface, buckling of serpentine structures under pressure and tensile, etc. These theories can determine the characteristics of tensile deformation, surface conformal, deformation stability and so on.
2）High-resolution electrohydrodynamic (EHD) printing: EHD printing has the drop-on-demand printing, near-field direct-writing, electrospray atomization and other printing modes, which can realize additive manufacturing and EHD lithography of submicron structures. It has been used in the fabrication of ultra-stretched piezoelectric sensors, ultra-thin touch screens, and so on.
3）Laser lift-off technology for ultra-thin flexible electronics: The mechanism model of laser-material interaction at peeling-PI interface is established. A laser lift-off technology for fabricating high-process temperature piezoelectric sensor on low temperature substrates is proposed. And it can realize the lift-off of 1-μm-thick flexible electronics efficiently.
4）Innovative applications. Briefly introduce flexible electronics in human physiology information collection (Epidermal electronics), various physical measurements of aircraft surfaces (smart skin), and other applications in other fields.
柔性混合电子是一种旨在保留传统集成电路处理能力的同时，实现柔性电子优势的整合方案，其制造过程要兼容微电子工艺与印刷工艺。本报告主要介绍柔性混合电子的设计方法和制造原理。
1）柔性混合电子的精细结构设计：自相似分形结构、不可拉伸材料曲面共形判定方法、波纹结构拉伸屈曲等，实现大拉伸变形、复杂曲面共形、变形稳定等特性；
2）高分辨率电流体喷印制造原理：具有按需喷印、近场直写、雾化制膜等喷印模式，可以实现亚微米结构的喷印制造和电流体光刻制造，已经用于超拉伸压电传感器、超薄触摸屏等制造。
3）超薄柔性电子激光剥离技术：建立了剥离-PI界面的激光-物质作用机理模型，提出了低温基板上制备高工艺温度压电传感器的激光剥离技术，实现1微米厚柔性电子的剥离制造；
4）简要介绍柔性电子在人体生理信息采集（表皮电子）、飞行器表面的多种物理测量（智能蒙皮）等领域的应用。
BIOGRAPHY
YongAn Huang, professor of Huazhong University of Science and Technology (HUST), vice director of State Key Laboratory of Digital Manufacturing Equipment and Technology, and a winner of The National Science Fund for Distinguished Young Scholars. He focuses on the research of design and manufacturing for flexible electronics like flexible printed display, smart skin of aircrafts, electronic skin of robots and epidermal electronics of human, has developed commercial EHD printer and laser lift-off equipment, and has published more than 100 papers in journals including Science Advances, Advanced Materials, Advanced Functional Materials, Materials Horizon, Nano Energy, Small, Nature Commumacation, etc, and also published 3 monographes. He has won first prize of Natural Science in Hubei Province, Gold/Special Gold Award on International Exhibition of Inventions in Geneva, Switzerland.
黄永安，华中科技大学教授，数字制造装备与技术国家重点实验室副主任，国家杰出青年科学基金获得者。致力于柔性电子设计与制造研究，研制了商业化的电流体喷印装备和激光剥离装备，在Science Advances、Advanced Materials、Advanced Functional Materials、Materials Horizon、Nano Energy、Small、Nature Comm.等期刊发表论文100余篇，出版著作3部。获得湖北省自然科学一等奖、陕西省科学技术一等奖、瑞士日内瓦国际发明金奖/特别金奖。